Wafer-Level Scanning

A detailed mechanical and electronic experimental setup mounted on a perforated metal base with an enclosed control unit on the left and a robotic arm-like system with various mechanical components.

Premium Microscope

The Klar Premium Microscope has a scanning capacity of 150 mm x 150 mm. It supports probes and other add-ons. Ideal for wafer level studies.

Klar’s Premium microscope system has the same features as the Mini Pro but scans larger areas, 150 mm x 150 mm. These instruments are designed to accommodate additional measurement hardware, including thermal stages, probe trips, pressure cells, and other measurement hardware.

A Premium Microscope with a 532 nm system is priced under $140,000.

    • Scanning capacity of 150 mm x 150 mm

    • XYZ Scanning

    • Supports probes and other add-ons.

    • Ideal for wafer level studies

    • Light excitation 349 to 975 nm

    • COMING SOON! Light excitation 266nm

    • PL spectral range 266 to 2500 nm

    • Submicron in-plane resolution

    • Millions of spectra can be collected

    • GPU accelerated fitting and analysis software

    • Compact compared to equivalent products

    • External interlock connector

    • Integrated laser safety system

    • Low temperature option

    • Everything you need to start taking data

    • Most flexible and versatile microscope

    • Fits a huge variety of samples

    • Accommodates many extras

    • Raman options available

  • The Premium Microscope’s universal optical design allows the owner to expand capabilities with user-replaceable wavelength kits.

    • Spectroscopy from the near-IR to the deep-UV (1700-266nm)

    • Change kits in less than 5 minutes

    • Custom kits available

  • Scanning capacity of 150 mm x 150 mm. Supports proves and other add-ons, including thermal stages, probe trips, pressure cells, and other measurement hardware.

Customizable Microscope for your Research Lab

Cadmium Telluride

Cadmium telluride (CdTe) and cadmium zinc telluride (CdZnTe, or CZT) are semiconductors with applications in solar cells and particle detection. For the solar cell market, low-cost synthesis techniques must be developed. In semiconductor alloys determination of the concentration of alloy constituents is of considerable importance to understand process dynamics during synthesis. In this example we will use cadmium zinc telluride (CZT) to show how the Zn content of CZT can be mapped using photoluminescence (PL) spectra. 

CZT is often grown using the Bridgeman technique in large boules. CZT typically has a weak PL signal and normally displays only a single well-defined peak. Klar’s microscopes are very sensitive, and using our robust modeling of the spectral features, small changes in PL peak energy can be detected. 

For this example, a slice of a CZT boule was mapped using a Klar Mini Pro instrument with 532 nm excitation, and the resulting PL spectra were fitted using a single bigaussian function. Figure 1 shows an example spectrum and fit and Figure 2 shows a spatial map of the peak energy. In these fits, available parameters are the emission peak energy, peak amplitude and peak width. We are presently concerned with the peak energy only. Read More….

A graph showing counts versus energy in electron volts (eV), with a prominent peak around 1.55 eV, indicating a spectral analysis or energy distribution.
False color map of the PL peak energy. Each point shows the value of the peak energy obtained from the spectral fits from a CZT boule

Fig. 1. Example PL spectrum (black) and fit (red) from a CZT boule. Here a single bigaussian curve is used to model the PL spectrum. Available parameters are peak energy, peak amplitude and peak width.

Fig. 2. False color map of the PL peak energy. Each point shows the value of the peak energy obtained from the spectral fits as shown in Fig. 1

[1] V. Corregidor and E. Dieguez, Correlation of resistivity with zinc content in a vapor grown (Cd,Zn)Te:Se, Appl. Phys. Lett. 81, 5153 (2002); https://doi.org/10.1063/1.1533124